季丰电子

■ 季丰材料分析实验室位于上海莘庄，由资深专家高强博士领衔，一期超过300m²，每台TEM/FIB都有独立的房间，加装门禁，有效控制晶片、样品安全，数据传输由TEM offline PC直接传输到客户FTP，保证数据安全。辅助设备包括Optical Microscope，laser Marker，ALD Coater，Pt Sputter Coater，Polisher等。为客户提供专业、快捷的服务。

材料分析

■ 分析设备

DB FIB G5 CX

赛默飞Dual Beam FIB G5 CX

Talos F200i TEM

赛默飞Talos F200i TEM透射电镜

研磨抛光 - Polish

Laser Marker

Optical Microscope

ALD

ALD
ALD

■ 季丰电子拍摄的A13-7nm FinFet Structure照片

后段metal层

Cross section(Y Cut)

后段metal层

Cross section(Y Cut)

EDS mapping

Cross section(Y Cut)

ON POLY

Cross section(Y Cut)

ON POLY

Cross section(Y Cut)

EDS mapping

Cross section(Y Cut)

BETWEEN POLY

Cross section(Y Cut)

BETWEEN POLY

Cross section(Y Cut)

BETWEEN POLY

Cross section(X Cut)

■ 季丰电子拍摄的3D NAND照片

3D NAND

Planar View

3D NAND

Planar View

3D NAND

Planar View

3D NAND

Planar View

EDS mapping

Planar View

EDS mapping

Planar View

EDS mapping

Planar View

EDS mapping

Planar View

EDS mapping

Planar View

EDS mapping

Planar View

EDS mapping

Planar View

材料分析

材料分析

■ 分析设备

DB FIB G5 CX

Talos F200i TEM

研磨抛光 - Polish

Laser Marker

Optical Microscope

ALD

■ 季丰电子拍摄的A13-7nm FinFet Structure照片

后段metal层

后段metal层

EDS mapping

ON POLY

ON POLY

EDS mapping

BETWEEN POLY

BETWEEN POLY

BETWEEN POLY

■ 季丰电子拍摄的3D NAND照片

3D NAND

3D NAND

3D NAND

3D NAND

EDS mapping

EDS mapping

EDS mapping

EDS mapping

EDS mapping

EDS mapping

EDS mapping

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