材料分析
材料分析
DB FIB G5 CX
赛默飞Dual Beam FIB G5 CXTalos F200i TEM
赛默飞Talos F200i TEM透射电镜研磨抛光 - Polish
研磨抛光 - PolishLaser Marker
Laser MarkerOptical Microscope
Optical MicroscopeALD
ALD
后段metal层
Cross section(Y Cut)后段metal层
Cross section(Y Cut)EDS mapping
Cross section(Y Cut)ON POLY
Cross section(Y Cut)ON POLY
Cross section(Y Cut)EDS mapping
Cross section(Y Cut)BETWEEN POLY
Cross section(Y Cut)BETWEEN POLY
Cross section(Y Cut)BETWEEN POLY
Cross section(X Cut)
3D NAND
Planar View3D NAND
Planar View3D NAND
Planar View3D NAND
Planar ViewEDS mapping
Planar ViewEDS mapping
Planar ViewEDS mapping
Planar ViewEDS mapping
Planar ViewEDS mapping
Planar ViewEDS mapping
Planar ViewEDS mapping
Planar View
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