材料分析

 ■ 季丰材料分析实验室位于上海莘庄,由资深专家高强博士领衔,一期超过300m²,每台TEM/FIB都有独立的房间,加装门禁,有效控制晶片、样品安全,数据传输由TEM offline PC直接传输到客户FTP,保证数据安全。辅助设备包括Optical Microscope,laser Marker,ALD Coater,Pt Sputter Coater,Polisher等。为客户提供专业、快捷的服务。

材料分析

材料分析
材料分析

 ■ 分析设备

DB FIB G5 CX

赛默飞Dual Beam FIB G5 CX
赛默飞Dual Beam FIB G5 CX

Talos F200i TEM

赛默飞Talos F200i TEM透射电镜
赛默飞Talos F200i TEM透射电镜

研磨抛光 - Polish

研磨抛光 - Polish
研磨抛光 - Polish

Laser Marker

Laser Marker
Laser Marker

Optical Microscope

Optical Microscope
Optical Microscope

ALD

ALD
ALD

 ■ 季丰TEM拍摄的14nm FinFET Structure照片

X&Y Cut

14nm FINFET Cross-section (X&Y Cut)
14nm FINFET Cross-section (X&Y Cut)

X&Y Cut

14nm FINFET Cross-section (X&Y Cut)
14nm FINFET Cross-section (X&Y Cut)

EDS Mapping

EDS Mapping
EDS Mapping

Planar View

14nm FINFET Planar View
14nm FINFET Planar View

 ■ 季丰TEM拍摄的3D NAND照片

Cross-section

3D NAND Cross-section
3D NAND Cross-section

Cross-section

3D NAND Cross-section
3D NAND Cross-section

Cross-section

3D NAND Cross-section
3D NAND Cross-section

Cross-section

3D NAND Cross-section
3D NAND Cross-section

Planar View

3D NAND Planar View
3D NAND Planar View

Planar View

3D NAND Planar View
3D NAND Planar View

Planar View

3D NAND Planar View
3D NAND Planar View

Planar View

3D NAND Planar View
3D NAND Planar View

EDS Mapping

EDS Mapping
EDS Mapping

EDS Mapping

EDS Mapping
EDS Mapping

EDS Mapping

EDS Mapping
EDS Mapping

EDS Mapping

EDS Mapping
EDS Mapping

EDS Mapping

EDS Mapping
EDS Mapping

EDS Mapping

EDS Mapping
EDS Mapping